Skip to main content

Sulfur Hexafluoride

High-purity sulfur hexafluoride

Air Liquide manufactures sulfur hexafluoride pure gas with purity up to 99.999% or as part of a Scott™ brand specialty gas mixture with air or nitrogen. Sulfur hexafluoride is used in many applications, including dielectric, heat insulation and plasma etching in semiconductor manufacturing. Sulfur hexafluoride in a balance of nitrogen is an excellent trace gas for use with instruments dedicated to detection of minor components.

  • Product Specifications

Sulfur Hexafluoride Pure Gas Grades
Sulfur Hexafluoride Gas Mixtures

Related Supply Modes

Air Liquide packages sulfur hexafluoride pure gases and Scott brand gas mixtures in a variety of high-pressure compressed gas cylinders, including lecture bottles and nonreturnable Mini-MixTM Transportables, depending on the grade of pure gas or mixture composition, and your application.

Related Equipment

Air Liquide manufactures gas handling equipment to deliver sulfur hexafluoride pure gas and gas mixtures safely to your point of use, including gas pressure regulators, gas manifolds and valves.